Scanning MEMS Mirror for High Definition and High Frame Rate Lissajous Patterns

Scanning MEMS Mirror for High Definition and High Frame Rate Lissajous Patterns

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Scanning MEMS (micro-electro-mechanical system) mirrors are attractive given their potential use in a diverse array of laser scanning display and imaging applications.Here we report on an electrostatic MEMS mirror for high definition and high frame rate (HDHF) Lissajous scanning.The MEMS mirror comprised a low Q-factor inner mirror and frame mirror, which provided two-dimensional scanning at two similar resonant scanning frequencies with high mechanical stability.The low Q inner mirror enabled a broad frequency selection range.The high definition and high frame incredibleindiatourtravels.com rate (HDHF) Lissajous scanning of the MEMS mirror was achieved by selecting a set of scanning frequencies near its resonance with a high greatest common divisor (GCD) and a high total lobe number.

The MEMS mirror had resonant scanning frequencies at 5402 Hz and 6702 Hz in x and y directions, respectively.The selected pseudo-resonant frequencies bovi-shield gold fp 5 l5 of 5450 Hz and 6700 Hz for HDHF scanning provided 50 frames per second with 94% fill factor in 256 × 256 pixels.This Lissajous MEMS mirror could be utilized for assorted HDHF laser scanning imaging and display applications.