Scanning MEMS Mirror for High Definition and High Frame Rate Lissajous Patterns
Scanning MEMS (micro-electro-mechanical system) mirrors are attractive given their potential use in a diverse array of laser scanning display and imaging applications.Here we report on an electrostatic MEMS mirror for high definition and high frame rate (HDHF) Lissajous scanning.The MEMS mirror comprised a low Q-factor inner mirror and frame mirror